Title :
A new measurement technique for capacitive coupling coefficients and 3-D capacitance characteristics in floating-gate devices
Author :
Choi, Woong L. ; Kim, Dae M. ; Choi, I.H.
Author_Institution :
Pohang University of Science and Technology
Keywords :
Capacitance measurement; Capacitance-voltage characteristics; Electric variables measurement; Electronics industry; Geometry; Laboratories; Measurement techniques; Nonvolatile memory; Testing; Voltage control;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771283
