DocumentCode :
2875120
Title :
Low capacitance, front-illuminated planar InGaAs PIN photodiode on semi-insulating InP substrate
Author :
Chuang, Zuon-Min ; Dai, Ting-Arn ; Ho, Wen-Jeng ; Chen, Jian-Guang ; Shih, Hung-Hui ; Lin, Wei ; Tu, Yuan-Kuang
Author_Institution :
Photonic Technology Research
fYear :
1994
fDate :
1994
Firstpage :
45968
Lastpage :
47064
Keywords :
Bandwidth; Bonding; Capacitance; Etching; Indium gallium arsenide; Indium phosphide; Optical fiber communication; Optical fiber devices; PIN photodiodes; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type :
conf
DOI :
10.1109/EDMS.1994.771300
Filename :
771300
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2875120
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