DocumentCode
2875120
Title
Low capacitance, front-illuminated planar InGaAs PIN photodiode on semi-insulating InP substrate
Author
Chuang, Zuon-Min ; Dai, Ting-Arn ; Ho, Wen-Jeng ; Chen, Jian-Guang ; Shih, Hung-Hui ; Lin, Wei ; Tu, Yuan-Kuang
Author_Institution
Photonic Technology Research
fYear
1994
fDate
1994
Firstpage
45968
Lastpage
47064
Keywords
Bandwidth; Bonding; Capacitance; Etching; Indium gallium arsenide; Indium phosphide; Optical fiber communication; Optical fiber devices; PIN photodiodes; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.771300
Filename
771300
Link To Document