Title :
Compositional disordering of AlGaAs/GaAs superlattices by low temperature grown GaAs
Author :
Tsang, J.S. ; Lee, C.P. ; Fan, J.C. ; Tsai, K.L. ; Chen, H.R.
Author_Institution :
National Chiao Tung University
Keywords :
Annealing; Furnaces; Gallium arsenide; Impurities; Mass spectroscopy; Molecular beam epitaxial growth; Photoluminescence; Substrates; Superlattices; Temperature;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771307
