• DocumentCode
    2875449
  • Title

    Planarizing dielectrics for VLSI technology

  • Author

    Liu, ChiWen ; Dai, BauTong ; Yeh, ChingFa ; Liu, ChienHung ; Wang, PoTsun

  • Author_Institution
    National Chiao Tung University
  • fYear
    1994
  • fDate
    1994
  • Firstpage
    31739
  • Lastpage
    32835
  • Keywords
    Chemical technology; Dielectric films; Dielectric materials; Dielectric measurements; Etching; Laboratories; Planarization; Scanning electron microscopy; Thickness measurement; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.771354
  • Filename
    771354
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2875449