• DocumentCode
    2875793
  • Title

    Electrical characteristics in a low pressure ferrite-free inductively coupled discharge

  • Author

    Chen, Yuming ; Liu, Yang

  • Author_Institution
    Inst. for Electr. Light Sources, Fudan Univ., Shanghai, China
  • fYear
    2011
  • fDate
    7-10 Nov. 2011
  • Firstpage
    2919
  • Lastpage
    2922
  • Abstract
    The electrical parameters of a low pressure ferrite-free inductively coupled discharge have been investigated. In the experiment plasma can be considered as a one-turn secondary load of an air-core transformer. The electrical conductivity ratio between the image part and the real part σi/σr can be obtained through calculating Maxwell equations. The electrical characteristics can be obtained by the calculation of the equivalent circuit.
  • Keywords
    Maxwell equations; discharges (electric); electrical conductivity; Maxwell equations; air-core transformer; electrical conductivity ratio; electrical parameters; equivalent circuit calculation; low pressure ferrite-free inductively coupled discharge; one-turn secondary load; Capacitance; Coils; Couplings; Discharges; Inductance; Plasma sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society
  • Conference_Location
    Melbourne, VIC
  • ISSN
    1553-572X
  • Print_ISBN
    978-1-61284-969-0
  • Type

    conf

  • DOI
    10.1109/IECON.2011.6119616
  • Filename
    6119616