Dedicated Machine Constraint Scheduling as a Shortest-Path Problem

Author

Pham, Huy Nguyen Anh ; Shr, Arthur ; Chen, Peter P.

Author_Institution

Dept. of Comput. Sci., Louisiana State Univ., Baton Rouge, LA, USA

fYear

2009

fDate

2-4 Nov. 2009

Firstpage

559

Lastpage

566

Abstract

This paper proposes a graph framework to undertake the issue of scheduling for dedicated machine constraint in the semiconductor manufacturing system. By finding the shortest paths in the graph, the framework finds the best scheduling result with an optimal makespan for the system. The framework first constructs a graph based on the current situation and then schedules wafers to machines under the constraint. Experiments are presented to validate the proposed graph framework.

Keywords

constraint handling; graph theory; single machine scheduling; dedicated machine constraint scheduling; graph theory construction; semiconductor manufacturing system; shortest-path scheduling problem; Artificial intelligence; Computer science; Etching; Fabrication; Integrated circuit yield; Job shop scheduling; Manufacturing systems; Processor scheduling; Production facilities; Semiconductor device manufacture; Dedicated Machine Constraint; scheduling; semiconductor manufacturing; shortest path;

fLanguage

English

Publisher

ieee

Conference_Titel

Tools with Artificial Intelligence, 2009. ICTAI '09. 21st International Conference on

Conference_Location

Newark, NJ

ISSN

1082-3409

Print_ISBN

978-1-4244-5619-2

Electronic_ISBN

1082-3409

Type

conf

DOI

10.1109/ICTAI.2009.13

Filename

5366970