Title :
Single-shot measurement of spatial coherence of 13-nm high-order harmonic
Author :
Nagata, Yutaka ; Furusawa, Kentaro ; Nabekawa, Yasuo ; Midorikawa, Katsumi
Author_Institution :
Laser Technol. Lab., RIKEN, Wako
Abstract :
We demonstrate single-shot measurement of fringe visibility of 13-nm high-order harmonic beam in a Youngpsilas double slit experiment. The visibility of 0.96 was obtained with optimal phase-matching condition for the 13-nm harmonics.
Keywords :
light interferometry; optical harmonic generation; optical phase matching; ultraviolet lithography; EUV lithography; Youngpsilas double slit experiment; fringe visibility; high-order harmonic beam generation; optimal phase-matching condition; single-shot measurement; spatial coherence; Laser excitation; Mirrors; Optical harmonic generation; Optical interferometry; Optical pulses; Power harmonic filters; Pulse measurements; Spatial coherence; Ultraviolet sources; Vibration measurement; 030.1640 Coherence; 120.3180 Interferometry; 260.7200 Ultraviolet, extreme;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4628562
