A Multiprocessor System-on-Chip Implementation of a Laser-based Transparency Meter on an FPGA

Modern FPGAs are large enough to implement multi-processor systems-on-chip (MPSoCs). Commercial FPGA companies also provide system design tools that abstract sufficient low-level system details to allow non-FPGA experts to design these systems for new applications. The application presented herein was designed by photomask researchers to implement a new technique for measuring the transparency of bimetallic grayscale masks using an FPGA platform. Production of the bimetallic grayscale masks requires a direct-write laser system. Previously, system calibration was determined by writing large rectangles of varying transparency on a mask and then measuring them using a spectrometer. The proposed technique uses the same mask-writing system but adds photodiode sensors connected to a multiprocessor computing system implemented on an FPGA. The added sensors combined with the laser beam´s smaller focal point allows the calibration rectangles to be up to 5000 times smaller than those required by the spectrometer. This allows for direct mask verification on a mum-sized scale. Furthermore, the MPSoC design on the FPGA is easily scalable to support an increased number of photodiodes for the future addition of a feedback approach to the project.