Title :
Fabrication of high-aspect-ratio microgrooves with laser-assisted wet etching for micro heat pipe
Author :
Oh, Kwang H. ; Lee, M.K. ; Kwon, S.J. ; Jeong, S.H.
Author_Institution :
Dept. of Mechatron., Gwangju Inst. of Sci. & Technol., Gwangju
Abstract :
Fabrication of high-aspect-ratio microgrooves with good profile and surface quality is realized using laser-assisted wet etching technique for the application to micro heat pipe.
Keywords :
heat pipes; laser beam etching; micromechanical devices; optical fabrication; high-aspect-ratio microgroove fabrication; laser-assisted wet etching; micro heat pipe; surface quality; Laser ablation; Laser theory; Optical device fabrication; Optical polarization; Optical surface waves; Power lasers; Steel; Surface emitting lasers; Wet etching; X-ray lasers; (140.0140) Lasers and laser optics; (140.3390) Laser materials processing;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4628599
