Title :
Non-electrical-contact LSI failure analysis using non-bias laser terahertz emission microscope
Author :
Nikawa, Kiyoshi ; Yamashita, Masatsugu ; Matsumoto, Toru ; Otani, Chiko ; Tonouchi, Masayoshi ; Midoh, Yoshihiro ; Miura, Katsuyoshi ; Nakamae, Koji
Author_Institution :
Grad. Sch. of Inf. Sci. & Technol., Osaka Univ., Suita, Japan
Abstract :
We have developed the laser terahertz emission microscope that does not require Vdd-biasing and signal input: NB (non-bias)-LTEM. The NB-LTEM, also, does not require signal output via electrodes. In this paper, first of all, the position of non-electrical contact tools, in failure analysis, is show. Secondary, the basic concept and the system schematic of the NB-LTEM are described. Thirdly, how to use the NB-LTEM in fault localization is explained. Then, some examples of fault localization or defect detection using the NB-LTEM are shown. Finally, we would like to compare the NB-LTEM and the other non-electrical contact tool (L-SQ, laser SQUID microscope).
Keywords :
failure analysis; large scale integration; optical microscopy; defect detection; failure analysis; fault localization; nonbias laser terahertz emission microscopy; nonelectrical contact tools; nonelectrical-contact LSI; Acoustic beams; Failure analysis; Large scale integration; Laser beams; Laser theory; Microscopy;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location :
Incheon
Print_ISBN :
978-1-4577-0159-7
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2011.5992751
