• DocumentCode
    2877468
  • Title

    Negative drain pulse stress induced two-stage degradation of P-channel poly-Si thin-film transistors

  • Author

    Lu, Xiaowei ; Wang, Mingxiang ; Zhang, Meng ; Wong, Man

  • Author_Institution
    Dept. of Microelectron., Soochow Univ., Suzhou, China
  • fYear
    2011
  • fDate
    4-7 July 2011
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Negative drain pulse stress induced degradation in p-channel poly-Si thin-film transistors (TFTs) was systematically investigated. On-state current (ION) exhibits two-stage degradation behaviors. In the first-stage degradation, electron injection related equivalent DC effect is responsible for the degradation behavior. While in the second-stage, based on a previously proposed PN junction degradation model, degradation behavior can be well understood, which is controlled by dynamic hot carrier (HC) degradation mechanism.
  • Keywords
    elemental semiconductors; hot carriers; p-n junctions; silicon; thin film transistors; P-channel poly-Si thin-film transistors; PN junction degradation model; Si; dynamic hot carrier degradation; electron injection; equivalent DC effect; negative drain pulse stress; on-state current; two-stage degradation; Degradation; Junctions; Logic gates; Silicon; Stress; Thin film transistors; Transient analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
  • Conference_Location
    Incheon
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4577-0159-7
  • Electronic_ISBN
    1946-1542
  • Type

    conf

  • DOI
    10.1109/IPFA.2011.5992756
  • Filename
    5992756