Title :
Reliability characterizations of resistive switching devices using zinc oxide thin film
Author :
Chiu, Fu-Chien ; Li, Peng-Wei ; Chang, Wen-Yuan ; Wu, Tai-Bor ; Chen, Chih-Chi ; Huang, Chih-Yao
Author_Institution :
Dept. of Electron. Eng., Ming-Chuan Univ., Taoyuan, Taiwan
Abstract :
In this work, Pt/ZnO/Pt capacitors were fabricated and investigated for nonvolatile memory applications. The memory devices exhibit inerratic and reproducible bipolar resistive switching characteristics. A forming electric field is required to induce the resistive switching property. The reliability characteristics of program/erase cycling endurance and data retention were measured. The high/low resistance states and specific set/reset voltages were examined by Weibull plots. In addition, the relationship between specific voltages and temperatures was also discussed.
Keywords :
Weibull distribution; capacitors; platinum; random-access storage; semiconductor device reliability; semiconductor thin films; zinc compounds; Weibull plots; ZnO-Pt; bipolar resistive switching; capacitors; data retention; nonvolatile memory applications; program-erase cycling endurance; reliability; resistance states; specific set-reset voltages; zinc oxide thin film; Capacitors; Nonvolatile memory; Resistance; Switches; Temperature; Temperature measurement; Zinc oxide;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location :
Incheon
Print_ISBN :
978-1-4577-0159-7
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2011.5992762