DocumentCode
2877734
Title
Laser induced writing of conductive copper lines for electronic devices
Author
Wang, W.J. ; Seufert, M. ; Lenhart, A. ; Jillek, W.
Author_Institution
Fudan Univ., Shanghai, China
fYear
2004
fDate
2004
Firstpage
174
Lastpage
176
Abstract
The direct writing of conductive copper lines on alumina substrates by means of a Nd/YAG-laser was investigated as an alternative to established thick-film and thin-film hybrid technology. Copper powder in the low micrometer range was sprayed as an aqueous dispersion on the surface of alumina substrates normally used for thick-film hybrids. With proper setting of the laser parameters, conductor lines with good adhesion and a relatively smooth surface were achieved. After removal of the excessive copper powder, the remaining copper particles acted as seeds for a subsequent electroless copper plating thus providing an electrical conductivity sufficient for electronic devices.
Keywords
adhesion; conductors (electric); copper; hybrid integrated circuits; laser deposition; powders; spraying; Cu; Nd:YAG laser; adhesion; alumina substrates; aqueous dispersion; ceramic substrate; conductive copper lines; direct writing; electroless plating; electronic devices; hybrid circuits; laser induced patterning; laser induced writing; relatively smooth surface; Adhesives; Conductive films; Conductors; Copper; Neodymium; Powders; Spraying; Substrates; Surface emitting lasers; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Asian Green Electronics, 2004. AGEC. Proceedings of 2004 International IEEE Conference on the
Print_ISBN
0-7803-8203-X
Type
conf
DOI
10.1109/AGEC.2004.1290896
Filename
1290896
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