DocumentCode
2877793
Title
A 20K gate CMOS gate array
Author
Saigo, Tatsuya ; Tago, H. ; Shiochi, M. ; Hiwatashi, T. ; Shima, Shohei ; Moriya, Takehiro
Author_Institution
Toshiba Research and Development Center, Kawasaki, Japan
Volume
XXVI
fYear
1983
fDate
23-25 Feb. 1983
Firstpage
156
Lastpage
157
Keywords
Delay effects; Etching; Hydrogen; Integrated circuit interconnections; Length measurement; Metallization; Ring oscillators; Semiconductor device measurement; Silicon compounds; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1983 IEEE International
Conference_Location
New York, NY, USA
Type
conf
DOI
10.1109/ISSCC.1983.1156545
Filename
1156545
Link To Document