Title :
Comparison of classical and two-photon photoelectric laser stimulation capabilities for failure analysis
Author :
Shao, K. ; Pouget, V. ; Faraud, E. ; Larue, C. ; Lewis, D.
Author_Institution :
IMS, Univ. of Bordeaux, Talence, France
Abstract :
This paper reviews important parameters for the two-photon absorption (TPA) laser stimulation technique and presents results concerning the characterization of the TPA effective spot size along lateral and axial directions. TPA scans are compared with classical photoelectric stimulation images to investigate TPA capabilities for failure analysis and design debug.
Keywords :
OBIC; failure analysis; photoelectricity; two-photon processes; design debug; failure analysis; photoelectric laser stimulation capabilities; two-photon absorption laser stimulation technique; Absorption; Laser beams; Measurement by laser beam; Optical imaging; Semiconductor lasers; Silicon;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location :
Incheon
Print_ISBN :
978-1-4577-0159-7
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2011.5992781
