• DocumentCode
    2878018
  • Title

    Surface roughness metrology study on flip-chip substrate

  • Author

    Ong, M.C. ; Lim, S.H. ; Zhao, X.L. ; Chin, J.M. ; Wang, S.R. ; Sun, W.X.

  • Author_Institution
    Device Anal. Lab., Adv. Micro Devices (Singapore) Pte Ltd., Singapore, Singapore
  • fYear
    2011
  • fDate
    4-7 July 2011
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    Precise measurement in the nanometer range is a challenge. This paper presents the metrology to measure the surface roughness on a flip-chip substrate using AFM and optical profiler. The effects of probe geometry, parameters, and repeatability on AFM measurements are investigated. Correlation results between AFM and optical profiler are studied.
  • Keywords
    atomic force microscopy; flip-chip devices; surface roughness; surface topography measurement; AFM; flip-chip substrate; optical profiler; probe geometry; surface roughness; Optical interferometry; Optical variables measurement; Probes; Rough surfaces; Substrates; Surface roughness; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
  • Conference_Location
    Incheon
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4577-0159-7
  • Electronic_ISBN
    1946-1542
  • Type

    conf

  • DOI
    10.1109/IPFA.2011.5992782
  • Filename
    5992782
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2878018