Title :
Surface roughness metrology study on flip-chip substrate
Author :
Ong, M.C. ; Lim, S.H. ; Zhao, X.L. ; Chin, J.M. ; Wang, S.R. ; Sun, W.X.
Author_Institution :
Device Anal. Lab., Adv. Micro Devices (Singapore) Pte Ltd., Singapore, Singapore
Abstract :
Precise measurement in the nanometer range is a challenge. This paper presents the metrology to measure the surface roughness on a flip-chip substrate using AFM and optical profiler. The effects of probe geometry, parameters, and repeatability on AFM measurements are investigated. Correlation results between AFM and optical profiler are studied.
Keywords :
atomic force microscopy; flip-chip devices; surface roughness; surface topography measurement; AFM; flip-chip substrate; optical profiler; probe geometry; surface roughness; Optical interferometry; Optical variables measurement; Probes; Rough surfaces; Substrates; Surface roughness; Surface topography;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location :
Incheon
Print_ISBN :
978-1-4577-0159-7
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2011.5992782
