Title :
Low voltage detection methods by microcolumn
Author :
Choi, S.K. ; Babin, S. ; Oh, T.S. ; Kim, D.W. ; Ahn, S. ; Kim, H.S.
Author_Institution :
CEBT Co., Incheon, South Korea
Abstract :
Low voltage microcolumn operated by less than 1keV beam energy and having high probe beam current can readily obtain low voltage images without bias voltages to sample. It has the main advantage of obtaining the information concentrated on thin surface layers, and can also obtain sample current images from sample without any detection devices. A sample current image has been analyzed using commercial Monte Carlo software.
Keywords :
Monte Carlo methods; scanning electron microscopy; Monte Carlo software; current image; low-voltage detection; microcolumn; probe beam current; scanning electron microscopy; Copper; Detectors; Electron beams; Low voltage; Photodiodes; Probes; Silicon;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location :
Incheon
Print_ISBN :
978-1-4577-0159-7
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2011.5992786
