Title :
Wire bonding, bumping & assembly related failures & improvements
Author :
Lim, Y.K. ; Yuan, S. ; Tan, J.B. ; Yeo, A. ; Hua, Y.N. ; Rao, N.R. ; Siah, S.Y.
Author_Institution :
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, Singapore
Abstract :
In this paper, investigation of wire bonding, bumping and assembly related failures are performed using optical microscopy, secondary electron microscopy and transmission electron microscopy. Also, the understandings of the failures and root causes are presented. For example, corrosions caused by contaminant such as Fluorine and Cu precipitates on Al-Cu alloyed bond pads that lead to discolored or non-stick on pads problem are discussed. In addition, the formation of small bumps when oxide/silicon nitride passivation is employed and chipping at die edges caused during assembly that leads to open-circuit are studied. In conclusion, possible solutions of these failures are recommended to achieve robust assembly and packaging.
Keywords :
aluminium alloys; assembling; copper alloys; corrosion; failure analysis; fluorine; lead bonding; optical microscopy; packaging; passivation; scanning electron microscopy; silicon compounds; transmission electron microscopy; Al-Cu; Al-Cu alloyed bond pads; Cu precipitates; F; Si3N4; assembly related failures; bumping; corrosions; die edges; fluorine; optical microscopy; oxide/silicon nitride passivation; packaging; secondary electron microscopy; transmission electron microscopy; wire bonding; Chemicals; Contamination; Copper; Corrosion; Inspection; Passivation; Tiles;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location :
Incheon
Print_ISBN :
978-1-4577-0159-7
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2011.5992798