Title :
Use of E-beam for random access read and write of digital test signals
Author :
Jensen, Jens ; Martin, Ken
Author_Institution :
Univ. of California at Los Angeles, Los Angeles, CA, USA
Abstract :
An E-beam that was used both to inject and read digital signals for diagnostic test of NMOS and CMOS ICs will be discussed. E-beam programmable master-slave flip-flops, which add less than 0.25pF circuit load, were included for signal injection purposes.
Keywords :
Circuit testing; Debugging; Degradation; Diodes; Electrons; Integrated circuit testing; MOS devices; Registers; Very large scale integration; Voltage;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1984 IEEE International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ISSCC.1984.1156632
