Title :
Novel micromachined GaAs circuits for millimeter wave applications
Author :
Müller, A. ; Konstantinidis, G. ; Neculoiu, D. ; Vasilache, D. ; Hazopulos, Z. ; Pantazis, A. ; Stavrinidis, A. ; Buiculescu, C. ; Petrini, I.
Author_Institution :
IMT, Bucharest, Romania
Abstract :
This paper discusses novel micromachined GaAs circuits for millimeter wave applications. A low loss line filter structure for 45 GHz, a Yagi-Uda antenna for 45 GHz and a micromachined receiver with Yagi-Uda antenna are primarily presented. The manufacturing of membrane supported filters, antenna and receiver structures have confirmed the capabilities of GaAs micromachining in manufacturing of high performance circuits for millimeter wave communication systems.
Keywords :
III-V semiconductors; MIMIC; Yagi antenna arrays; gallium arsenide; micromachining; millimetre wave antennas; millimetre wave receivers; passive filters; semiconductor device manufacture; 45 GHz; GaAs; GaAs manufacturing; Yagi-Uda antenna; low loss line filter structure; micromachined GaAs circuits; micromachined receiver; millimeter wave communication systems; Biomembranes; Filters; Gallium arsenide; Micromachining; Millimeter wave circuits; Millimeter wave communication; Millimeter wave technology; Passive circuits; Receiving antennas; Wet etching;
Conference_Titel :
Electron Devices for Microwave and Optoelectronic Applications, 2004. EDMO 2004. 12th International Symposium on
Print_ISBN :
0-7803-8574-8
DOI :
10.1109/EDMO.2004.1412391
