Title :
ION beam observation in the MadHex helicon source
Author :
Wiebold, Matt ; Sung, Yung-Ta ; Scharer, John
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA
Abstract :
Summary form only given. The MadHex experimental system consists of a 150 cm long, 10 cm inner diameter Pyrex tube connected to a stainless steel expansion chamber 60 cm long and 45 cm in diameter (expansion ratio RE = 4.5) with an axial magnetic field, variable up to 1 kG at the source region that can be operated in nozzle or flat field configurations. An 18 cm long, 12 cm diameter half-turn double-helix antenna is used to excite helicon waves in the source. Ion beams of energy up to E = 160 eV at 500 W RF power have been observed in a flowing argon helicon plasma formed in the expanding region of the MadHex helicon source using a magnetic nozzle (RM = 1.44). The effect of flow rate/pressure, RF power and magnetic field strength on the ion beam acceleration, plasma potential, electron density and temperature are explored. The ion energy distribution function (IEDF) is obtained by a two-grid Retarding Potential Analyzer (RPA). The plasma potential is determined by a floating emissive probe and the electron density and temperature are measured by both single and double probes. The measured density decrease of ~20 across the double layer in the magnetic expansion region does not fit a Boltzmann expansion but does agree with a conservation-of-flux calculation using the measured beam energy. Additionally, the axial ion velocities and temperatures are observed via argon 668 nm Laser Induced Fluorescence (LIF). The results of fast and slow argon ion beams at lower flow rates (~1.3 sccm) with different RF powers are reported in the transition between Pyrex and expanding exhaust regions. The variation of the IEDF in the expansion chamber is also confirmed with RPA results.
Keywords :
argon; fluorescence; high-frequency discharges; nozzles; plasma density; plasma magnetohydrodynamics; plasma pressure; plasma probes; plasma sheaths; plasma sources; plasma temperature; plasma transport processes; stainless steel; Ar; Boltzmann expansion; Laser Induced Fluorescence; MadHex helicon source; Pyrex tube; RF power; RPA results; axial ion velocities; axial magnetic field; conservation-of-flux calculation; double probes; electron density; electron volt energy 160 eV; flat field configurations; floating emissive probe; flow rate-pressure effect; flowing argon helicon plasma; half-turn double-helix antenna; ion beam acceleration; ion energy distribution function; magnetic field strength; magnetic nozzle; mass 1 kg; measured beam energy; plasma potential; power 500 W; single probes; size 10 cm; size 12 cm; size 150 cm; size 18 cm; size 45 cm; size 60 cm; stainless steel expansion chamber; two-grid Retarding Potential Analyzer; Radio frequency;
Conference_Titel :
Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-61284-330-8
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2011.5992979