Title :
Computer simulation of metal Ion beam enhanced deposition of metallization for diamond film
Author :
Guoqing, Li ; Wong, N.B. ; Tao, Zhang ; Lee, S-T. ; Zongxin, Mu
Author_Institution :
Dalian University of Technology, P.R.China
Keywords :
Adhesives; Computer simulation; Ion beams; Ion implantation; Metallization; Monte Carlo methods; Sputtering; Substrates; Tail; Testing;
Conference_Titel :
Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium
Conference_Location :
Tomsk, Russia
Print_ISBN :
0-7803-5172-X
DOI :
10.1109/SIBCON.1999.771712
