DocumentCode

2880284

Title

Means for generation and injection of low energy focused electron beams into gas

Author

Orlikov, L.N.

Author_Institution

TUSUR

Volume

2

fYear

1999

fDate

1999

Firstpage

478

Lastpage

479

Keywords

Charge carrier processes; Electron beams; Electron sources; Gases; Inorganic materials; Laser excitation; Machining; Polymer films; Shape; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium

Print_ISBN

0-7803-5172-X

Type

conf

DOI

10.1109/SIBCON.1999.771715

Filename

771715