Title :
Means for generation and injection of low energy focused electron beams into gas
Author_Institution :
TUSUR
Keywords :
Charge carrier processes; Electron beams; Electron sources; Gases; Inorganic materials; Laser excitation; Machining; Polymer films; Shape; Vacuum technology;
Conference_Titel :
Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium
Print_ISBN :
0-7803-5172-X
DOI :
10.1109/SIBCON.1999.771715
