Simultaneous identification of linear parameters and nonlinear rolling friction for ball screw driven stage

Ball screw driven stages have nonlinear friction and its influences appear in frequency characteristic and positioning. Generally, linear parameters are identified in conditions without nonlinear friction effect, and nonlinear friction characteristic is obtained in conditions without linear parameters effect. In this paper, the method which can identify linear parameters and nonlinear rolling friction characteristic simultaneously is proposed. Experimental results show the accuracy of proposed linear parameters identification and effectiveness of rolling friction compensation which derives from the characteristic extracted by proposed method.