Analysis and simulation of RF MEMS switch for wireless communication

This paper takes the cantilever beam MEMS switch as an example to discuss mechanical principle and function simulation of the RF MEMS switch in wireless communication system, we select three kinds of the cantilever beam with different section to analyze their switch characteristic, and to compute and use the software of ANSYS to carry out multi-physical coupling analysis and simulation. The relation between the distortion of the cantilever beam and the threshold voltage and the inherent frequency of three kinds of the beam is discussed. The results provide a good theoretical help in designing various high performance RF MEMS switches with the variational section beam.