DocumentCode
2881366
Title
Different Wire Layouts for CMOS Inductors
Author
Karjalainen, Paivi H. ; Heino, Pekka
Author_Institution
Tampere Univ. of Technol., Tampere
fYear
2007
fDate
May 29 2007-June 1 2007
Firstpage
1846
Lastpage
1850
Abstract
The easiest way to improve the quality and decrease the size of the integrated passive components is to improve their layout. On-wafer CMOS inductors with different layouts of metal coils aimed at optimizing the component characteristics are processed, measured, and analyzed. Narrow extra wires at the edges of spirals and continuous via arrays in the spirals are found to be effective, when peak value of quality factor (Q) and resonance frequency (fres) are considered the critical parameters.
Keywords
CMOS integrated circuits; Q-factor; coils; inductors; wires (electric); CMOS inductors; integrated passive components; metal coils; quality factor; resonance frequency; wire layouts; CMOS process; CMOS technology; Circuits; Conducting materials; Conductivity; Dielectric substrates; Inductors; Resistors; Silicon; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2007. ECTC '07. Proceedings. 57th
Conference_Location
Reno, NV
ISSN
0569-5503
Print_ISBN
1-4244-0985-3
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2007.374048
Filename
4250134
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