DocumentCode :
2881366
Title :
Different Wire Layouts for CMOS Inductors
Author :
Karjalainen, Paivi H. ; Heino, Pekka
Author_Institution :
Tampere Univ. of Technol., Tampere
fYear :
2007
fDate :
May 29 2007-June 1 2007
Firstpage :
1846
Lastpage :
1850
Abstract :
The easiest way to improve the quality and decrease the size of the integrated passive components is to improve their layout. On-wafer CMOS inductors with different layouts of metal coils aimed at optimizing the component characteristics are processed, measured, and analyzed. Narrow extra wires at the edges of spirals and continuous via arrays in the spirals are found to be effective, when peak value of quality factor (Q) and resonance frequency (fres) are considered the critical parameters.
Keywords :
CMOS integrated circuits; Q-factor; coils; inductors; wires (electric); CMOS inductors; integrated passive components; metal coils; quality factor; resonance frequency; wire layouts; CMOS process; CMOS technology; Circuits; Conducting materials; Conductivity; Dielectric substrates; Inductors; Resistors; Silicon; Wire;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2007. ECTC '07. Proceedings. 57th
Conference_Location :
Reno, NV
ISSN :
0569-5503
Print_ISBN :
1-4244-0985-3
Electronic_ISBN :
0569-5503
Type :
conf
DOI :
10.1109/ECTC.2007.374048
Filename :
4250134
Link To Document :
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