Title :
Laser crystallization for flat panel display
Author :
Knowles, David ; Turk, Brandon ; Burfeindt, Bernd ; Brown, Shane
Author_Institution :
TCZ Team Cymer Zeiss GmbH, San Diego, CA
Abstract :
We will review the status of current laser based crystallization processes, and discuss the specifications and the critical design aspects of the laser and of the optical system developed for the TCZ production tool.
Keywords :
crystallisation; flat panel displays; laser materials processing; optical design techniques; flat panel display; laser crystallization; optical system; Crystallization; Flat panel displays; Glass; Laser beams; Liquid crystal displays; Optical attenuators; Optical design; Optical films; Power lasers; Surface emitting lasers; (120.2040) Displays; (140.2180) Excimer Laser;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4628852
