Title :
Laser micromachining of ORMOCERs for high resolution fabrication of optical devices
Author :
Clauss, E. ; Mager, L. ; Rehspringer, J.L. ; Fort, A. ; Fontaine, J.
Author_Institution :
LSP/ENSPS, Pole API, Illkirch
Abstract :
We present optical waveguides and diffractive optical elements fabricated by laser micromachining of original hybrid Si/Ti/Org ORMOCERs. We demonstrate that the material response to laser ablation allows fabrication of structures at submicrometric scale.
Keywords :
diffractive optical elements; laser ablation; laser beam machining; laser materials processing; micromachining; optical fabrication; optical waveguides; ORMOCER; diffractive optical elements; high resolution fabrication; laser ablation; laser micromachining; optical devices; optical waveguides; Laser ablation; Micromachining; Optical device fabrication; Optical devices; Optical interferometry; Optical materials; Optical refraction; Optical variables control; Optical waveguides; Waveguide lasers; Diffractive optics (050.1970); Microstructure fabrication (220.4000); Solgel (160.6060);
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4628859
