Title :
MEMS tunable THz filters for sensing
Author :
Sanphuang, Varittha ; Nahar, Niru K. ; Volakis, J.L.
Author_Institution :
Electr. & Comput. Eng. Dept., Ohio State Univ., Columbus, OH, USA
Abstract :
We propose a tunable THz filter using frequency selective surfaces (FSS) integrated with MEMS switches for terahertz (THz) sensing. These types of filter windows are placed in front of THz sensors to increase signal-to-noise ratio and reduce sensor sensitivity with mid IR and visible light bands. The FSS filter is simulated using Pyrex glass dielectric layer as substrate and employs double square loop slots. Simulations show excellent transmittance. According to different position of MEMS switches (up and down), the peak frequency is varied over 0-0.56 THz.
Keywords :
filters; frequency selective surfaces; microswitches; FSS; MEMS switches; Pyrex glass dielectric layer; THz sensors; filter windows; frequency 0 THz to 0.56 THz; frequency selective surfaces; mid IR bands; sensor sensitivity; signal-to-noise ratio; terahertz sensing; tunable THz filters; visible light bands; Band-pass filters; Filtering theory; Frequency selective surfaces; Microswitches; Microwave filters; Optical filters; Sensors;
Conference_Titel :
Antennas and Propagation Society International Symposium (APSURSI), 2013 IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4673-5315-1
DOI :
10.1109/APS.2013.6711225