• DocumentCode
    2881735
  • Title

    MEMS tunable THz filters for sensing

  • Author

    Sanphuang, Varittha ; Nahar, Niru K. ; Volakis, J.L.

  • Author_Institution
    Electr. & Comput. Eng. Dept., Ohio State Univ., Columbus, OH, USA
  • fYear
    2013
  • fDate
    7-13 July 2013
  • Firstpage
    1130
  • Lastpage
    1131
  • Abstract
    We propose a tunable THz filter using frequency selective surfaces (FSS) integrated with MEMS switches for terahertz (THz) sensing. These types of filter windows are placed in front of THz sensors to increase signal-to-noise ratio and reduce sensor sensitivity with mid IR and visible light bands. The FSS filter is simulated using Pyrex glass dielectric layer as substrate and employs double square loop slots. Simulations show excellent transmittance. According to different position of MEMS switches (up and down), the peak frequency is varied over 0-0.56 THz.
  • Keywords
    filters; frequency selective surfaces; microswitches; FSS; MEMS switches; Pyrex glass dielectric layer; THz sensors; filter windows; frequency 0 THz to 0.56 THz; frequency selective surfaces; mid IR bands; sensor sensitivity; signal-to-noise ratio; terahertz sensing; tunable THz filters; visible light bands; Band-pass filters; Filtering theory; Frequency selective surfaces; Microswitches; Microwave filters; Optical filters; Sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Antennas and Propagation Society International Symposium (APSURSI), 2013 IEEE
  • Conference_Location
    Orlando, FL
  • ISSN
    1522-3965
  • Print_ISBN
    978-1-4673-5315-1
  • Type

    conf

  • DOI
    10.1109/APS.2013.6711225
  • Filename
    6711225