Vertically Coupled Polymer Microdisk Resonators Fabricated by Photolithography Technique

In this paper, a vertically coupled polymer microdisk resonator has been demonstrated and characterized. This vertically coupled resonator is fabricated using polymers instead of semiconductors, as well as standard photolithography instead of electron beam lithography (EBL), in contrast to laterally coupled polymer devices. This vertically coupled structure and fabrication process enables simpler mass manufacture of the microresonators in arrays at the chip scale for applications including integrated sensing and chip scale WDM filters.