Title :
W-band on wafer measurement of active and passive devices
Author :
Edgar, D.L. ; Elgaid, K. ; Williamson, F. ; Ross, A. ; McLelland, H. ; Ferguson, Stacey ; Doherty, F. ; Thayne, I.G. ; Taylor, M.R.S. ; Beaumont, S.P.
Author_Institution :
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
Abstract :
In this paper we have presented a study of the effect of back-thinning standard CPW wafers and the influence on measured W-band performance. Improvements in measured insertion loss and substrate cross-talk have been observed, and a study of the effect of a quartz spacer layer has been made. Additionally, the improvement in measured performance of active devices after wafer thinning has also been shown, and further progress is expected in this area
Keywords :
millimetre wave measurement; CPW wafer thinning; W-band on-wafer measurement; active device; insertion loss; passive device; quartz spacer layer; substrate crosstalk;
Conference_Titel :
Microwave Measurements: Current Techniques and Trends (Ref. No. 1999/008), IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19990025
