DocumentCode :
288222
Title :
Microelectronics and microengineering: the technology combination of the future
Author :
Young, D.C.
Author_Institution :
Southampton Univ., UK
fYear :
1994
fDate :
34389
Firstpage :
42370
Lastpage :
42371
Abstract :
The technology for complete integration of transducers, electronic measurement system and actuators on a single chip already exists, though microengineering is still in its infancy and development of a complete system on a chip will pass through a logical sequence. First generation systems will likely consist of separate sensor, actuator and electronic chips perhaps mounted in the same header. Sensors with some on board electronics have already been demonstrated and complete system chips will be developed in the forseeable future
Keywords :
electric sensing devices; integrated circuit technology; micromechanical devices; actuators; electronic measurement system; first generation systems; microengineering; on board electronics; sensor chips; transducers;
fLanguage :
English
Publisher :
iet
Conference_Titel :
Application Specific Integrated Circuits for Measurement Systems, IEE Colloquium on
Conference_Location :
London
Type :
conf
Filename :
369875
Link To Document :
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