Combining CMOS and MEMS technologies in a monolithic system for observing filter pollutions

Author

Heinz, Steffen ; Erler, Klaus ; Walter, Thomas ; Seidel, Ralf ; Horstmann, John T. ; Neubert, Marco ; Pohle, Alexander ; Gross, Christian ; Gabriel, Paul D.

Author_Institution

Chemnitz Univ. of Technol., Chemnitz, Germany

fYear

2011

fDate

7-10 Nov. 2011

Firstpage

4049

Lastpage

4053

Abstract

The combination of CMOS and MEMS technologies in principle opens new potentials for the creation of complex, compact, reliable solutions. Within the current research work a “SmartFilter” module to observe the pollution of filters in suction and filtering systems has been developed, provided with piezoresistive pressure sensor, controller core, power management, digital and analog signal processing as well as an RFID interface to allow wireless transfer of energy and data. The system design, the RFID-frontend including an antenna, aspects of analog signal design and packaging are discussed. Basis of the innovation is the integration of a pressure sensor fabrication module into a modern 350 nm CMOS mixed-signal semiconductor technology.

Keywords

CMOS integrated circuits; microsensors; mixed analogue-digital integrated circuits; piezoresistive devices; pressure sensors; radiofrequency identification; CMOS mixed-signal semiconductor technology; MEMS technology; RFID interface; RFID-frontend; analog signal design; analog signal processing; antenna; digital signal processing; filter pollutions; monolithic system; piezoresistive pressure sensor; power management; size 350 nm; smartfilter module; wireless transfer; Antennas; CMOS integrated circuits; Capacitors; Micromechanical devices; Radiofrequency identification; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society

Conference_Location

Melbourne, VIC

ISSN

1553-572X

Print_ISBN

978-1-61284-969-0

Type

conf

DOI

10.1109/IECON.2011.6119973

Filename

6119973