Title :
Indirect adaptive trajectory control of MEMS LCR
Author_Institution :
Purdue Sch. of Eng. & Technol., IUPUI, Indianapolis, IN, USA
Abstract :
This paper illustrates the application of an indirect adaptive trajectory controller for MEMS lateral comb resonators to obtain better convergence and trajectory performance. A recursive least square estimator with forgetting factor is used to estimate the parameters of MEMS in real-time. Accordingly, the control law and gains are derived to achieve high performance trajectory controls. Simulation results demonstrate a close trajectory profile and accurate parameter estimation performance.
Keywords :
adaptive control; convergence; least squares approximations; micromechanical resonators; recursive estimation; trajectory control; MEMS LCR; MEMS lateral comb resonator; close trajectory profile; control gain; control law; convergence performance; indirect adaptive trajectory control; parameter estimation performance; recursive least square estimator; trajectory performance; Adaptation models; Convergence; Force; Micromechanical devices; Parameter estimation; Springs; Trajectory;
Conference_Titel :
IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-1-61284-969-0
DOI :
10.1109/IECON.2011.6119976
