Simulation of micro-cantilever based series switch and development of its ANN model

Author

Naduvinamani, Sujata N. ; Sheeparamatti, B.G. ; Kalalbandi, Sandeep ; Sheeparamatti, Rajeshwari

Author_Institution

Dept. of Electron. & Commun. Eng., Basaveshwar Eng. Coll., Bagalkot, India

fYear

2011

fDate

7-10 Nov. 2011

Firstpage

4078

Lastpage

4083

Abstract

This paper discusses few geometrical design issues to reduce the actuation voltage of series MEMS switch. It presents the design of RF-MEMS series cantilever based switch with pull-down electrodes using parallel capacitance between beam and pull down electrode. The switch structure is composed of aluminum material. Minimum actuation voltage achieved is 8 Volts. The simulation of the switch is carried out in CoventorWare a MEMS modeling and simulation software. An ANN model using the toolbox of MATLAB is developed using the results of simulation of designed switch in CoventorWare and it is also validated. This model can be used to take any required results quickly within the permissible range for the designed switch.

Keywords

cantilevers; electronic engineering computing; microswitches; neural nets; ANN model; CoventorWare; MATLAB toolbox; MEMS modeling; RF-MEMS series cantilever microswitches design; actuation voltage reduction; geometrical design; microcantilever based series switch simulation; parallel capacitance; pull down electrode; simulation software; switch structure; voltage 8 V; Artificial neural networks; Electrodes; Mathematical model; Microswitches; Radio frequency; Substrates; ANN model; CoventorWare; MEMS series switch; RF-MEMS switch; low actuation voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society

Conference_Location

Melbourne, VIC

ISSN

1553-572X

Print_ISBN

978-1-61284-969-0

Type

conf

DOI

10.1109/IECON.2011.6119979

Filename

6119979