Title :
Integrated optics on silicon for sensor applications
Author :
Cristea, Dana ; Caldararu, Mira ; Paraschiv, Anca ; Craciunoiu, Florea
Author_Institution :
Nat. Inst. for Res. & Dev. of Microtechnol., Bucharest, Romania
Abstract :
This paper presents our research in the field of integrated optics. We integrated on the same silicon chip different components (photodetectors, waveguides, couplers, interferometers, transducing layers) and realized chemo-optical sensors on one silicon chip
Keywords :
chemical sensors; integrated optics; integrated optoelectronics; light interferometers; optical couplers; optical waveguides; photodetectors; silicon; Si; chemo-optical sensors; couplers; integrated optics; interferometers; optical sensor applications; photodetectors; silicon; silicon chip; transducing layers; waveguides; Couplers; Electromagnetic waveguides; Integrated optics; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Photodetectors; Silicon;
Conference_Titel :
Electrotechnical Conference, 1998. MELECON 98., 9th Mediterranean
Conference_Location :
Tel-Aviv
Print_ISBN :
0-7803-3879-0
DOI :
10.1109/MELCON.1998.699477
