Adhesion´s macroscopic exhibition of CVD diamond films on Si substrate and its relationship with film´s microstructure

Author

Ma, Wei ; Yu, Jilin ; Zhou, Haiyang ; Zhu, Xiaodong ; Zhan, Rujuan

Author_Institution

Dept. of Modern Mech., Univ. of Sci. & Technol. of China, Hefei, China

fYear

2000

fDate

2000

Firstpage

394

Lastpage

397

Abstract

The adhesion force of a CVD diamond film on a Si substrate was detected by direct tensile tests. The test was performed on a tensile testing rig equipped with a S570 scanning electronic microscope, and the whole testing process (load-strain curve) was recorded. By means of Raman spectrum analysis and SEM photography, the relationship between the microstructure of the diamond film and the macro-exhibition of the adhesion force is found and a reasonable explanation of this phenomenon is given

Keywords

Raman spectra; adhesion; chemical vapour deposition; diamond; elemental semiconductors; scanning electron microscopy; semiconductor thin films; tensile testing; C-Si; CVD diamond films; Raman spectrum analysis; S570 scanning electronic microscope; SEM photography; Si; Si substrate; adhesion; adhesion force; diamond film microstructure; direct tensile tests; film microstructure; load-strain curve; tensile testing rig; testing process; Acoustic testing; Adhesives; Bars; Chemical vapor deposition; Electronic equipment testing; Microstructure; Optical films; Scanning electron microscopy; Semiconductor films; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Materials and Packaging, 2000. (EMAP 2000). International Symposium on

Conference_Location

Hong Kong

Print_ISBN

0-7803-6654-9

Type

conf

DOI

10.1109/EMAP.2000.904187

Filename

904187