• DocumentCode
    2883801
  • Title

    Role of Teflon and LiCl on the humidity-sensing properties of porous anodized alumina film

  • Author

    Chakraborty, Supratic ; Lai, P.T. ; Chakraborty, Chaitali

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Hong Kong Univ., China
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    78
  • Lastpage
    81
  • Abstract
    The electrical properties of capacitive humidity sensors, based on an aluminium film anodized in phosphoric acid, are investigated. The properties of teflon-deposited or LiCl-coated porous alumina film are also measured. It is found that sensitivity of porous alumina film increases after teflon or LiCl deposition. Moreover, the teflon-deposited alumina sensor exhibits shorter response time
  • Keywords
    alumina; anodised layers; capacitive sensors; humidity sensors; porous materials; Al2O3; LiCl; LiCl coating; Teflon coating; capacitive humidity sensor; electrical properties; porous anodized alumina film; Aluminum; Capacitance; Capacitive sensors; Delay; Dielectric substrates; Electron beams; Humidity measurement; Oxidation; Sputtering; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2000. Proceedings. 2000 IEEE Hong Kong
  • Conference_Location
    Hong Kong
  • Print_ISBN
    0-7803-6304-3
  • Type

    conf

  • DOI
    10.1109/HKEDM.2000.904220
  • Filename
    904220
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2883801