Title :
Role of Teflon and LiCl on the humidity-sensing properties of porous anodized alumina film
Author :
Chakraborty, Supratic ; Lai, P.T. ; Chakraborty, Chaitali
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ., China
Abstract :
The electrical properties of capacitive humidity sensors, based on an aluminium film anodized in phosphoric acid, are investigated. The properties of teflon-deposited or LiCl-coated porous alumina film are also measured. It is found that sensitivity of porous alumina film increases after teflon or LiCl deposition. Moreover, the teflon-deposited alumina sensor exhibits shorter response time
Keywords :
alumina; anodised layers; capacitive sensors; humidity sensors; porous materials; Al2O3; LiCl; LiCl coating; Teflon coating; capacitive humidity sensor; electrical properties; porous anodized alumina film; Aluminum; Capacitance; Capacitive sensors; Delay; Dielectric substrates; Electron beams; Humidity measurement; Oxidation; Sputtering; Temperature sensors;
Conference_Titel :
Electron Devices Meeting, 2000. Proceedings. 2000 IEEE Hong Kong
Conference_Location :
Hong Kong
Print_ISBN :
0-7803-6304-3
DOI :
10.1109/HKEDM.2000.904220
