DocumentCode

2883962

Title

Nanostructures By Laser Direct Etching Of Silicon

Author

Mullenhorn, M. ; Dirac, H. ; Grey, F.

fYear

1996

fDate

8-13 Sept. 1996

Firstpage

236

Lastpage

236

Keywords

Etching; Nanostructures; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on

Conference_Location

Hamburg, Germany

Print_ISBN

0-7803-3169-9

Type

conf

DOI

10.1109/CLEOE.1996.562394

Filename

562394