Title :
Nanostructures By Laser Direct Etching Of Silicon
Author :
Mullenhorn, M. ; Dirac, H. ; Grey, F.
Keywords :
Etching; Nanostructures; Silicon;
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562394
