Laser-Machined Cascaded Micro Cavities for Simultaneous Measurement of Dual Parameters Under High Temperature

Author

Zengling Ran ; Cheng Li ; Hongmei Zuo ; Yi Chen

Author_Institution

Key Lab. of Opt. Fiber Sensing & Commun. (Minist. of Educ.), Univ. of Electron. Sci. & Technol. of China, Chengdu, China

Volume

13

Issue

5

fYear

2013

fDate

May-13

Firstpage

1988

Lastpage

1991

Abstract

Fiber-optic cascaded micro Fabry-Perot (F-P) cavities fabricated by 157-nm laser micromachining is demonstrated for simultaneous measurement of high temperature and refractive index, or high temperature and strain, respectively. The sensor head consists of a short air extrinsic F-P cavity and an intrinsic single-mode fiber F-P cavity. These two micro cavities possess different response coefficients to temperature, strain, and refractive index, which are utilized for dual parameters measurement. Experimental results show that dual parameters measurement could have been achieved from 50^°C to 380^°C based on such a sensing structure.

Keywords

laser beam machining; micro-optics; micromachining; refractive index; dual parameters measurement; fiber-optic cascaded micro Fabry-Perot cavities; intrinsic single-mode fiber F-P cavity; laser micromachining; laser-machined cascaded micro cavities; refractive index; sensor head; short air extrinsic F-P cavity; simultaneous measurement; temperature 50 C to 380 C; wavelength 157 nm; Cavity resonators; Optical fiber sensors; Optical fibers; Plasma temperature; Strain; Temperature measurement; Temperature sensors; High temperature; laser micromachining; micro cavity; simultaneous measurement;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2013.2241537

Filename

6420859