DocumentCode
2884332
Title
Yield statistics for large area ICs
Author
Stapper, C.
Author_Institution
IBM General Technology Division, Essex Junction, VT, USA
Volume
XXIX
fYear
1986
fDate
19-21 Feb. 1986
Firstpage
168
Lastpage
169
Abstract
This report will cover an examination of Poisson statistics and their inadequacy to represent defects in large area chips on a wafer. Measurements of defects will be cited and the consequences on redundancy methods will be discussed.
Keywords
Analysis of variance; Instruments; Integrated circuit technology; Integrated circuit yield; Manufacturing processes; Redundancy; Semiconductor device modeling; Statistical distributions; Statistics; Wafer scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1986 IEEE International
Conference_Location
Anaheim, CA, USA
Type
conf
DOI
10.1109/ISSCC.1986.1156918
Filename
1156918
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