Title :
Effect of Indium doping on the Gas sensing behavior of Zinc oxide films obtained by Chemical spray pyrolysis method
Author :
Nisha, R ; Madhusoodanan, K.N. ; Vimalkumar, T.V. ; Vijayakumar, K.P.
Author_Institution :
Department of Instrumentation, Cochin University of Science and Technology, India
Abstract :
NO2 gas Sensing characteristics of thin films of Zinc oxide obtained by spray pyrolysis were studied. The film thickness was about 550nm. The effect of indium doping on the sensor performance were also studied. The sensing behavior in the temperature range of 100–225°C was measured to find out the optimal working temperature.
Keywords :
NO2 gas sensing; ZnO film; chemical spray pyrolysis; indium doping;
Conference_Titel :
Physics and Technology of Sensors (ISPTS), 2012 1st International Symposium on
Conference_Location :
Pune, India
Print_ISBN :
978-1-4673-1040-6
DOI :
10.1109/ISPTS.2012.6260923
