Ion energy distribution measurements of a radiofrequency plasma source immersed in Vacuum

Author

Shabshelowitz, A. ; Gallimore, A.D.

Author_Institution

Univ. of Michigan, Ann Arbor, MI, USA

fYear

2011

fDate

26-30 June 2011

Firstpage

1

Lastpage

1

Abstract

Summary form only given. Measurements of the ion energy distribution downstream of a rf plasma source are performed using a Retarding Potential Analyzer (RPA). The plasma source is an assembly of six solenoid magnets, an antenna, and a quartz tube that are all surrounded by a steel case to increase the magnetic field strength and uniformity. This source is installed and operated inside the Junior Test Facility (JTF) at the Plasmadynamics and Electric Propulsion Laboratory (PEPL), which is connected to the Large Vacuum Test Facility (LVTF) through a 60cm diameter gate valve. Thus, JTF can utilize LVTF´s seven nude cryopumps to hold the background pressure below 5×10^-6 Torr during operation. RPA characteristics are collected at a number of operating conditions when the gate valve is both open and closed to investigate the effect of background pressure on ion energy measurements. Electrical characteristics of the discharge are also investigated.

Keywords

cryopumping; discharges (electric); plasma pressure; plasma sources; antenna; background pressure; cryopumps; discharge; electrical characteristics; gate valve; ion energy distribution; magnetic field strength; magnetic field uniformity; quartz tube; radiofrequency plasma source; retarding potential analyzer; size 60 cm; solenoid magnets; vacuum; Energy measurement; Plasma measurements; Plasma sources; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on

Conference_Location

Chicago, IL

ISSN

0730-9244

Print_ISBN

978-1-61284-330-8

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2011.5993301

Filename

5993301