Title :
Writing Nanostructures with a Helium Beam
Author :
Nowak, Sophie ; Pfau, Timo ; Mlynek, Jaroslav
Keywords :
Cameras; Energy resolution; Gold; Helium; Lithography; Metastasis; Nanofabrication; Nanostructures; Resists; Writing;
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562399
