Numerical study of the electron dynamics in radio-frequency plasmas at atmospheric pressure

Summary form only given. The dynamics of electrons plays an important role for the behavior of radio-frequency driven discharges, particularly at high pressures. The electron dynamics itself is highly driven by the dynamics of the plasma boundary sheath. In this work we study a radio-frequency driven atmospheric pressure plasma jet which is frequently employed as an efficient plasma sources for surface modification. We concentrate on secondary electron effects and excitation mechanisms in Helium/Oxygen mixtures by means of self-consistent plasma simulations.