Title :
Investigation of nanolayers´ properties generated on Si surface in H2O
Author :
Bilenko, D.I. ; Belobrovaya, O.Ya. ; Malyar, I.V. ; Mel´nikova, T.E. ; Mysenko, I.B. ; Polyanskaya, V.P. ; Terin, D.V.
Author_Institution :
Saratov State Univ., Saratov, Russia
Abstract :
This article deals with investigation of nanolayers´ properties generated on Si surface in H2O.
Keywords :
nanofabrication; nanostructured materials; H2O; Si; nanolayers; Electronic mail; Silicon; Water;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4244-6954-3
DOI :
10.1109/APEDE.2010.5624036
