DocumentCode
2885835
Title
Submicron MOSFET performance at liquid nitrogen temperatures
Author
Ogura, Shotaroh ; Kroesen, P. ; Codella, C. ; Rovedo, N. ; Cheung, Stephane
Author_Institution
IBM, Hopewell Junction, NY, USA
Volume
XXIX
fYear
1986
fDate
19-21 Feb. 1986
Firstpage
160
Lastpage
161
Abstract
Conclusions of a study on submicron silicon gate MOSFET performance, indicating that 0.5μm devices operating at liquid nitrogen temperatures afford twice the speed and reduced sensitivity to power supply voltage than sub-0.25μm devices at room temperatures, will be discussed. Test devices using double-implanted lightly-doped drains were used in the anaylsis.
Keywords
Capacitance; Electrons; Logic devices; MOSFET circuits; Nitrogen; Power supplies; Semiconductor process modeling; Temperature; Threshold voltage; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference. Digest of Technical Papers. 1986 IEEE International
Conference_Location
Anaheim, CA, USA
Type
conf
DOI
10.1109/ISSCC.1986.1157006
Filename
1157006
Link To Document