Title :
Toward an experimental measurement of the impedance field
Author :
Penarier, A. ; Nouvel, P. ; Varani, Luca ; Shiktorov, P. ; Gruzinskis, V. ; Starikov, Jevgenij
Author_Institution :
IES, Univ. Montpellier 2, Montpellier, France
Abstract :
The possibility to develop a novel technique that might provide a direct measurement of the impedance field using an electromagnetic near-field equipment is investigated. Preliminary experiments have been performed on silicon substrate using a coaxial near-field probe. The first results show a signal transmission via an air coupling and not a propagation inside the device. Some critical problems have been identified to improve the test-bench.
Keywords :
electric impedance measurement; silicon; Si; coaxial near-field probe; electromagnetic near-field equipment; impedance field measurement; signal transmission; silicon substrate; test-bench; Couplings; Electromagnetics; Impedance; Noise; Ports (Computers); Probes; Semiconductor device measurement;
Conference_Titel :
Noise and Fluctuations (ICNF), 2013 22nd International Conference on
Conference_Location :
Montpellier
Print_ISBN :
978-1-4799-0668-0
DOI :
10.1109/ICNF.2013.6579000
