DocumentCode
2886736
Title
To optimisation of polyharmonical MPFS
Author
Zakharov, -É A. ; Kivokurtzev, A. Yu ; Spiridonov, R.V.
Author_Institution
Saratov State Tech. Univ., Saratov, Russia
fYear
2010
fDate
22-23 Sept. 2010
Firstpage
336
Lastpage
343
Abstract
The designing method for improvement of focusing abilities of polyharmonycal MPFS is described.
Keywords
electron beam focusing; optimisation; designing method; focusing abilities; polyharmonical MPFS optimisation; Focusing; Optimization;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4244-6954-3
Type
conf
DOI
10.1109/APEDE.2010.5624096
Filename
5624096
Link To Document