DocumentCode
2886919
Title
Synthesis of noncontact probes for charge and potential microdistribution measurement
Author
Matveeva, I.A.
Author_Institution
Saratov State Tech. Univ., Saratov, Russia
fYear
2010
fDate
22-23 Sept. 2010
Firstpage
291
Lastpage
298
Abstract
The solution of the noncontact probe synthesis problem is suggested. Some characteristics of the system are known: the distance between the probe and the research surface, the thickness of layers, the dielectric permittivity of layers. The layers are plane-parallel. The function, which describes transformation of surface charge or potential distribution into an electric signal, is equal 0 on the boundary surface except the probe plane. On this plane the function is unknown. The expressions for determination of this function on probe surface according to the given spatial transformation coefficients for charge or potential are received. It is possible to make this function by technical or (and) program means. The experimental results are considered.
Keywords
charge measurement; permittivity; probes; surface charging; boundary surface; charge microdistribution measurement; dielectric permittivity; electric signal; noncontact probe synthesis problem; potential microdistribution measurement; spatial transformation coefficients; surface charge; Charge measurement; Dielectrics; Electric potential; Permittivity; Permittivity measurement; Probes;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4244-6954-3
Type
conf
DOI
10.1109/APEDE.2010.5624106
Filename
5624106
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