Title :
Synthesis of noncontact probes for charge and potential microdistribution measurement
Author_Institution :
Saratov State Tech. Univ., Saratov, Russia
Abstract :
The solution of the noncontact probe synthesis problem is suggested. Some characteristics of the system are known: the distance between the probe and the research surface, the thickness of layers, the dielectric permittivity of layers. The layers are plane-parallel. The function, which describes transformation of surface charge or potential distribution into an electric signal, is equal 0 on the boundary surface except the probe plane. On this plane the function is unknown. The expressions for determination of this function on probe surface according to the given spatial transformation coefficients for charge or potential are received. It is possible to make this function by technical or (and) program means. The experimental results are considered.
Keywords :
charge measurement; permittivity; probes; surface charging; boundary surface; charge microdistribution measurement; dielectric permittivity; electric signal; noncontact probe synthesis problem; potential microdistribution measurement; spatial transformation coefficients; surface charge; Charge measurement; Dielectrics; Electric potential; Permittivity; Permittivity measurement; Probes;
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4244-6954-3
DOI :
10.1109/APEDE.2010.5624106