• DocumentCode
    2886919
  • Title

    Synthesis of noncontact probes for charge and potential microdistribution measurement

  • Author

    Matveeva, I.A.

  • Author_Institution
    Saratov State Tech. Univ., Saratov, Russia
  • fYear
    2010
  • fDate
    22-23 Sept. 2010
  • Firstpage
    291
  • Lastpage
    298
  • Abstract
    The solution of the noncontact probe synthesis problem is suggested. Some characteristics of the system are known: the distance between the probe and the research surface, the thickness of layers, the dielectric permittivity of layers. The layers are plane-parallel. The function, which describes transformation of surface charge or potential distribution into an electric signal, is equal 0 on the boundary surface except the probe plane. On this plane the function is unknown. The expressions for determination of this function on probe surface according to the given spatial transformation coefficients for charge or potential are received. It is possible to make this function by technical or (and) program means. The experimental results are considered.
  • Keywords
    charge measurement; permittivity; probes; surface charging; boundary surface; charge microdistribution measurement; dielectric permittivity; electric signal; noncontact probe synthesis problem; potential microdistribution measurement; spatial transformation coefficients; surface charge; Charge measurement; Dielectrics; Electric potential; Permittivity; Permittivity measurement; Probes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
  • Conference_Location
    Saratov
  • Print_ISBN
    978-1-4244-6954-3
  • Type

    conf

  • DOI
    10.1109/APEDE.2010.5624106
  • Filename
    5624106